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Dr Aron Michael

Dr Aron Michael

Senior Lecturer
  • BE in Electrical Engineering from AAU
  • MEngSc in Electronics and Communication from School of EE&T, UNSW
  • PhD in Electrical Engineering from School of EE&T, UNSW
Engineering
Electrical Engineering and Telecommunications

Dr.Aron Michael received the B.E . (Hons.) degree ( in electrical engineering ) from UOA, MEngSc degree ( in electrical engineering) from UNSW, and PhD degree (in electrical engineering) from UNSW. He was appointed lecturer(in 2013) in the School of Electrical Engineering and Telecommunication, UNSW andis currently a senior lecturer with the same school.His current research interest is Nano/Micro electro mechanical systems (N/MEMS) for optical switching, interconnect, micro-optics, piezoelectric actuators for micro-optics, low thermal budget silicon films,silicon photonics, and carbon nanofibers for flexible sensors. He has published more than 90 scientific publications in these areas.

Mobile
04272725457
Phone
(02)90658924 , (02)93855663
Location
G17, Level 3, 316
  • Books | 2011
    Michael AW; Kwok CY, 2011, Novel Micro-bridge Actuator For Optical Switching Application, Original, LAP LAMBERT Academic Publishing, Germany,
  • Book Chapters | 2013
    Michael AW; Michael A; Kwok CY; Al Hafiz M; Xu YW, 2013, 'OPTICAL FIBER ON A SILICON CHIP', in Harun SW; Arof H (ed.), Current Development in Optical Fiber Technology, INTECH, Croatia, pp. 541 - 585,
  • Journal articles | 2024
    Ho YN; Michael A; Kwok CY; Pulikkaseril C, 2024, 'Parallel in-Plane Electrothermal Actuators', Journal of Microelectromechanical Systems, 33, pp. 305 - 307,
    Journal articles | 2024
    Michael A; Chuang IYH; Kwok CY; Omaki K, 2024, 'Low-thermal-budget electrically active thick polysilicon for CMOS-First MEMS-last integration', Microsystems and Nanoengineering, 10,
    Journal articles | 2023
    Mirjalali S; Bagherzadeh R; Abrishami S; Asadnia M; Huang S; Michael A; Peng S; Wang CH; Wu S, 2023, 'Multilayered Electrospun/Electrosprayed Polyvinylidene Fluoride+Zinc Oxide Nanofiber Mats with Enhanced Piezoelectricity', Macromolecular Materials and Engineering, 308,
    Journal articles | 2023
    Rasid SMR; Michael A; Pota HR, 2023, 'Dynamic modeling of a piezoelectric micro-lens actuator with experimental validation', Sensors and Actuators A: Physical, 356,
    Journal articles | 2023
    Rasid SMR; Michael A; Pota HR, 2023, 'On-Chip Self-Sensing Piezoelectric Micro-Lens Actuator With Feedback Control', IEEE Sensors Journal, 23, pp. 10275 - 10284,
    Journal articles | 2022
    Nawaz MH; Michael A; Pota HR; Chen SH; Rasid SMR, 2022, 'A robust resonant controller design for MEMS-based multi-layered prestressed piezoelectric cantilever beam', Sensors and Actuators A: Physical, 341,
    Journal articles | 2022
    Rasid SMR; Michael A; Pota HR; Chen SH, 2022, 'Design and Implementation of Robust Resonant Controller for Piezoelectrically Driven Micro-Lens Actuator', Journal of Microelectromechanical Systems, 31, pp. 840 - 850,
    Journal articles | 2021
    Christoe MJ; Phaoseree N; Han J; Michael A; Atakaramians S; Kalantar-Zadeh K, 2021, 'Meandering Pattern 433 MHz Antennas for Ingestible Capsules', IEEE Access, 9, pp. 91874 - 91882,
    Journal articles | 2021
    Christoe MJ; Yuan J; Michael A; Kalantar-Zadeh K, 2021, 'Bluetooth Signal Attenuation Analysis in Human Body Tissue Analogues', IEEE Access, 9, pp. 85144 - 85150,
    Journal articles | 2021
    Grand RS; Burger L; Gräwe C; Michael AK; Isbel L; Hess D; Hoerner L; Iesmantavicius V; Durdu S; Pregnolato M; Krebs AR; Smallwood SA; Thomä N; Vermeulen M; Schübeler D, 2021, 'BANP opens chromatin and activates CpG-island-regulated genes', Nature, 596, pp. 133 - 137,
    Journal articles | 2020
    Chen SH; Michael A; Kwok CY, 2020, 'Enhancing out-of-plane stroke in piezoelectrically driven micro-lens actuator with residual stress control', Sensors and Actuators, A: Physical, 303,
    Journal articles | 2020
    Rasid SMR; Michael A; Chen SH; Pota HR; Kwok CY, 2020, 'Dynamic Performance Improvement of Piezoelectrically Driven Micro-Lens Actuators', Journal of Microelectromechanical Systems, 29, pp. 1418 - 1420,
    Journal articles | 2020
    Sengupta D; Chen SH; Michael A; Kwok CY; Lim S; Pei Y; Kottapalli AGP, 2020, 'Single and bundled carbon nanofibers as ultralightweight and flexible piezoresistive sensors', npj Flexible Electronics, 4, pp. 9,
    Journal articles | 2019
    Chen SH; Michael A; Kwok CY, 2019, 'Design and Modeling of Piezoelectrically Driven Micro-Actuator with Large Out-of-Plane and Low Driving Voltage for Micro-Optics', Journal of Microelectromechanical Systems, 28, pp. 919 - 932,
    Journal articles | 2018
    Chuang I; Michael A; Soeriyadi A; Kwok CY, 2018, 'Aluminum Induced Crystallization of In-Situ Phosphorus Doped E-Beam Evaporated Silicon Films for High Gauge Factor Piezo-Resistors', IEEE Electron Device Letters, 39, pp. 889 - 892,
    Journal articles | 2018
    Wang P; Michael A; Kwok CY, 2018, 'Silicon waveguide cantilever displacement sensor for potential application for on-chip high speed AFM', Frontiers of Optoelectronics, 11, pp. 53 - 59,
    Journal articles | 2017
    Chen SH; Michael A; Kwok CY, 2017, 'Enabling PZT bimorph actuator with passive polysilicon structure', Electronics Letters, 53, pp. 1373 - 1375,
    Journal articles | 2017
    Michael A; Wang P; Kwok CY, 2017, 'High aspect ratio sharp nanotip for nanocantilever integration at CMOS compatible temperature', Nanotechnology, 28,
    Journal articles | 2017
    Michael AW; Wang P; Kwok CY, 2017, 'Cantilever Inverse Taper Coupler with SiO2 Gap for Submicron Silicon Waveguides,', IEEE Photonics Technology Letters, 29,
    Journal articles | 2016
    Al Hafiz MA; Michael A; Kwok CY, 2016, 'Planar microlens with front-face angle: Design, fabrication, and characterization', Journal of Micro/ Nanolithography, MEMS, and MOEMS, 15,
    Journal articles | 2016
    Chen SH; Michael A; Kwok CY, 2016, 'E-beam Evaporated Polysilicon for Lead Zirconate Titanate-Based Micro-Actuators', IEEE Electron Device Letters, 37, pp. 1347 - 1350,
    Journal articles | 2016
    Michael A; Chen SS; Kwok CY, 2016, 'Feedback Driven Fast Piezoelectric Micro-lens Actuator', Procedia Engineering, 168, pp. 1492 - 1495,
    Journal articles | 2015
    Michael A; Kwok CY; Wang P; Kazuo O; Varlamov S, 2015, 'Investigation of E-Beam Evaporated Silicon Film Properties for MEMS Applications', Journal of Microelectromechanical Systems, 24, pp. 1951 - 1959,
    Journal articles | 2015
    Michael A; Kwok CY, 2015, 'Piezoelectric micro-lens actuator', Sensors and Actuators, A: Physical, 236, pp. 116 - 129,
    Journal articles | 2014
    Michael A; Kwok CY, 2014, 'Inter-digitated piezoelectric actuation mechanism for micro-optics application', Procedia Engineering, 87, pp. 1394 - 1397,
    Journal articles | 2014
    Wang P; Michael A; Kwok CY, 2014, 'Fabrication of sub-micro silicon waveguide with vertical sidewall and reduced roughness for low loss applications', Procedia Engineering, 87, pp. 979 - 982,
    Journal articles | 2013
    Michael A; Kwok CY, 2013, 'Evaporated thick polysilicon film with low stress and low thermal budget', Journal of Microelectromechanical Systems, 22, pp. 825 - 827,
    Journal articles | 2013
    Michael AW; Peng W; Kwok CY, 2013, 'On-chip optical nano-scale displacement sensor', Micro/Nano Materials, Devices, and Systems,
    Journal articles | 2012
    Michael AW; Hafiz AA; Puzzer T; Kwok CY, 2012, 'Deposition and characterization of thick graded index Si xO yF z films with low stress', Sensors and Actuators A - Physical, 178, pp. 110 - 117,
    Journal articles | 2012
    Michael AW; Kwok CY, 2012, 'Monolithically integrated out-of-plane micro-mirror', Sensors and Actuators A - Physical, 179, pp. 263 - 276,
    Journal articles | 2012
    Xu Y; Michael AW; Kwok CY; Puzzer T; Peng G, 2012, '1D planar silica lens integrated 3D optical interconnect system – fabrication techniques of lens integrated facingdown 45􀁱 micro-mirror', Procedia Engineering, 47, pp. 478 - 481,
    Journal articles | 2012
    Xu Y; Michael AW; Kwok CY; Puzzer T; Peng G, 2012, 'Integration of 1D planar silica grin lens in 3D optical interconnect system', Electronics Letters, 48, pp. 585 - 586,
    Journal articles | 2011
    Michael AW; Kwok CY, 2011, 'Piezoelectrically driven micro-lens out-of-plane actuation', Procedia Engineering, 25, pp. 697 - 700,
    Journal articles | 2011
    Xu Y; Michael AW; Kwok CY, 2011, 'Formation of ultra-smooth 45° micromirror on (1 0 0) silicon with low concentration TMAH and surfactant: Techniques for enlarging the truly 45° portion', Sensors and Actuators A - Physical, 166, pp. 164 - 171,
    Journal articles | 2009
    Kwok CY; Xu Y; Michael AW; Peng G, 2009, 'A novel technique of fabricating rear 45 micromirror for stacked die optical interconnect', , 1
    Journal articles | 2008
    Michael AW; Kwok CY; Yu KS; Mackenzie MR, 2008, 'A novel bistable two-way actuated out-of-plane electrothermal microbridge', Journal of Microelectromechanical Systems, 17, pp. 58 - 69,
    Journal articles | 2007
    Michael AW; Kwok CY, 2007, 'Buckling shape of elastically constrained multi-layered micro-bridges', Sensors and Actuators A - Physical, 135, pp. 870 - 880,
    Journal articles | 2007
    Michael AW; Kwok CY, 2007, 'Thermo-mechanical behaviour of buckled multi-layered micro-bridges', Sensors and Actuators A - Physical, 137, pp. 157 - 168
    Journal articles | 2006
    Mackenzie MR; Kwok CY; Michael AW; Yu K; Kaalund CJ, 2006, 'Etch slope compensation for planar silica waveguide lens pair', Electronics Letters, 42, pp. 2034 - 2043,
    Journal articles | 2006
    Michael AW; Kwok CY, 2006, 'Design criteria for bi-stable behaviour in a buckled multi-layered MEMS bridge', Journal of Micromechanics and Microengineering, 16, pp. 2034 - 2043,
    Journal articles | 2005
    Yu K; Michael AW; Kwok CY, 2005, 'Two- Way bistable out-of-plane actuator using Ti/Sio2 Bilayer', Proceedings of SPIE Volume 7503, 5649, pp. 721 - 732,
  • Preprints | 2023
    Michael A; Chuang I, 2023, Low Thermal Budget Electrically Active Thick Polysilicon for Post CMOS MEMS-Last Integration, ,
    Conference Papers | 2022
    Rasid SMR; Michael A; Pota HR; Chen SH, 2022, 'Self-sensing Piezoelectric Micro-lens Actuator', in Proceedings of IEEE Sensors,
    Conference Papers | 2021
    Rasid SMR; Michael A; Pota HR; Chen SH; Kwok CY, 2021, 'Modelling and Experimental Validation of Piezoelectrically Driven Micro-Lens Actuator', in 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021, pp. 443 - 446,
    Conference Papers | 2020
    Rasid SMR; Wang Y; Michael A; Chen S-H; Pota HR, 2020, 'A Resonant Controller Design of Piezo-electrically Driven Micro-lens Actuator', in Haliyo S; Boudaoud M; Sill A; Fatikow S (eds.), 2020 INTERNATIONAL CONFERENCE ON MANIPULATION, AUTOMATION AND ROBOTICS AT SMALL SCALES (MARSS 2020), IEEE, CANADA, Toronto, pp. 17 - 18, presented at International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS), CANADA, Toronto, 13 July 2020 - 17 July 2020,
    Conference Papers | 2020
    Rasid SMR; Wang Y; Michael A; Chen SH; Pota HR, 2020, 'A Resonant Controller Design of Piezo-electrically Driven Micro-lens Actuator', in Proceedings of MARSS 2020: International Conference on Manipulation, Automation, and Robotics at Small Scales,
    Conference Papers | 2019
    Chaung I; Michael A; Kwok CY, 2019, 'Study and Application of In-Situ Phosphorus Doped Thick Polysilicon Films at Low Temperature for Post CMOS-MEMS Integration', in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 299 - 302,
    Conference Papers | 2019
    Chen SH; Michael A; Kwok CY, 2019, 'A Novel High Performance Piezoelectrically Driven Microlens Actuator for Micro-Optics Applications', in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, pp. 1487 - 1490,
    Conference Papers | 2018
    Chen S-H; Michael A; Kwok C, 2018, 'A Fast Response MEMS Piezoelectric Microlens Actuator with Large Stroke and Low Driving Voltage', Singapore, Singapore, presented at 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Singapore, Singapore, 22 April 2018 - 26 April 2018,
    Patents | 2018
    Chen SH; Michael A; Kwok CY, 2018, Piezoelectric Microlens Actuator, Patent No. 2018900447,
    Conference Papers | 2018
    Chuang I; Michael A; Soeriyadi A; Kwok CY, 2018, 'In-situ phosphorus doped ultra-high vacuum e-beam evaporated silicon for high gauge factor polysilicon', in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Belfast, UK, pp. 1040 - 1043, presented at 2018 IEEE Micro Electro Mechanical Systems (MEMS), Belfast, UK, 21 January 2018 - 25 January 2018,
    Patents | 2018
    Kwok CY; Chen S-H; Michael A; Sengupta D, 2018, Advanced piezoelectric microlens actuator, Patent No. 2018903188,
    Patents | 2018
    Michael A; Chen S-H; Kwok CY, 2018, Process of fabricating lead zirconate titanate (PZT) based piezoelectric devices, Patent No. ,
    Conference Papers | 2018
    Michael A; Sengupta D; Kwok CY; Kottapalli AGP; Miao J, 2018, 'OptimizedPolyvinylideneFluorideNanofiberWebsforFlexible EnergyHarvesters', in EUROSENSORS 2018, MDPI, Graz, Austria, pp. 857 - 857, presented at Eurosensors, Graz, Austria, 09 September 2018 - 12 September 2018,
    Conference Papers | 2018
    Sengupta D; Prakash Kottapalli AG; Chen S-H; Michael A; Kwok C; Miao J; Triantafyllou MS, 2018, 'Flexible Graphitized Polyacrylonitrile Nanofiber Bundles for Strain Sensors', Singapore, Singapore, presented at 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Singapore, Singapore, 22 April 2018 - 26 April 2018,
    Conference Papers | 2017
    Michael AW; Chen S-H; Wang P; Chuang I; Kwok CY; Liu A, 2017, 'Fabrication of Bimorph PZT Micro-Actuators with Passive Polysilicon Structure', in Fabrication of Bimorph PZT Micro-Actuators with Passive Polysilicon Structure, The 7th International Multidisciplinary Conference on Optofluidics 2017, Singapore, presented at The 7th International Multidisciplinary Conference on Optofluidics 2017, Singapore, 25 July 2017 - 28 July 2017,
    Conference Papers | 2017
    Michael AW; Chuang I; Kwok C, 2017, 'High Gauge Factor Piezoresistors Using Aluminium Induced Crystallisation of Silicon at Low Thermal Budget', in Proceedings, MDPI, France, Paris, pp. 354, presented at Eurosensors, France, Paris, 03 September 2017 - 06 September 2017,
    Conference Papers | 2017
    Michael AW; Wang P; Chen SH; Chuang I; Kwok CY, 2017, 'Fabrication of nano-scale high aspect ratio ultra sharp tips for nano-mechanical structures at low thermal budget', in TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, Institute of Electrical and Electronics Engineers (IEEE), Kaohsiung, pp. 1328 - 1331, presented at Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017 19th International Conference on, Kaohsiung, 18 June 2017 - 22 June 2017,
    Conference Presentations | 2016
    Michael AW; Wang P; Kwok CY, 2016, 'Highly efficient and Misalignment Tolerant Inversely Tapered Fiber-to-Silicon Wire Waveguide Coupler', presented at APCOT 2016, Kanazawa, Japan, 26 June 2016 - 29 June 2016
    Conference Presentations | 2016
    Michael AW, 2016, 'Design and Modelling of a novel micro-lens piezo-electric actuator for generation of fast and large movement', presented at APCOT2016, Kanazawa, Japan, 26 April 2016 - 29 April 2017
    Conference Papers | 2015
    Chen SH; Michael A; Kwok CY; Wang P, 2015, 'Design and simulation of piezoelectric PZT micro-actuators with integrated piezoresistive displacement sensors for micro-optics applications', in Proceedings of SPIE - The International Society for Optical Engineering,
    Conference Papers | 2015
    Michael A; Kwok C; Chen S-H, 2015, 'Design, fabrication, and characterisation of interdigitated piezo-electric actuation mechanism for mixing-optics', in 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, Institute of Electrical and Electronics Engineers (IEEE), Anchorage, pp. 2101 - 2104, presented at Solid-state sensors, actuators and Microsystems, Anchorage, 21 June 2015 - 25 June 2015,
    Conference Papers | 2015
    Wang P; Michael A; Kwok CY; Chen SH, 2015, 'Misalignment tolerant efficient inverse taper coupler for silicon waveguide', in Proceedings of SPIE - The International Society for Optical Engineering,
    Conference Presentations | 2014
    Kwok CY, 2014, 'Studies on a compact Si-Grating/micro-mirror/silica waveguide coupler', presented at APCOT 2014, 7th Asia-pacific Conference on Transducers and Micro/nano Technologies, Daegu, South Korea, 29 June 2014 - 02 July 2014
    Conference Papers | 2014
    Micahel A; Al Hafiz MA; Kwok CY, 2014, 'Effect of front face angle on the performance of planar GRIN silica micro-lens', in 7th Asia-Pacific Conf. on Transducers and Micro/Nano Technologies(APCOT),Daegu, Korea, 29 Jun - 2 Jul 2014
    Conference Presentations | 2014
    Michael AW, 2014, 'Characterization of In-situ doped thick polysilicon films deposited using ultra-high vacuum E-beam evaporation at low thermal budget', presented at 7th Asia-Pacific Conf. on Transducers and Micro/Nano Technologies(APCOT), Daegu, South Korea, 29 June 2014 - 02 July 2014
    Conference Papers | 2013
    Michael A; Kwok CY, 2013, 'LOW THERMAL BUDGET LOW STRESS THICK POLYSILICON FILMS FOR MEMS USING ULTRA-HIGH VACUUM E-BEAM EVAPORATION', Spain, presented at Transducers, Spain, 16 June 2013 - 20 June 2013,
    Conference Papers | 2010
    Xu Y; Michael AW; Kwok CY; Peng G, 2010, 'Detail study on the rear 45° micromirror smoothness on (100) Si substrates', in Procedia Engineering, Elsevier BV, Netherlands, pp. 858 - 861, presented at 24th Eurosensors Conference, Linz, 05 September 2010 - 08 September 2010,
    Conference Papers | 2008
    Kwok CY; Michael AW; Xu Y, 2008, 'Techniques for improvement of 45 degrees micromirrors fabricated in silicon.', in 4th Asia Pacific Conference on Transducers and Micro / Nano Technologies, 4th Asia Pacific Conference, Taiwan, presented at 4th Asia Pacific Conference, Taiwan, 22 June 2008 - 25 June 2008
    Conference Papers | 2008
    Michael AW; Kwok CY; Kaalund CJ, 2008, 'Novel out-of-plane micro-mirror actuator - art. no. 68000Q', in Tan HH; Chiao JC; Faraone L; Jagadish C; Williams J; Wilson AR (eds.), Proceedings of SPIE Volume 7503, SPIE, Washington, USA, pp. Q8000 - Q8000, presented at Optical and IR Telescope Instrumentation and Detectors, Canberra, AUSTRALIA,
    Conference Papers | 2008
    Michael AW; Kwok CY, 2008, 'Fabrication of monolithically integrated micromirror into a micro-bridge actuator using thin silicon substrate', in 4th Asia Pacific Conference on Transducers and Micro / Nano Technologies, 4th Asia Pacific Conference, Taiwan, presented at 4th Asia Pacific Conference, Taiwan, 22 June 2008 - 25 June 2008
    Conference Papers | 2008
    Michael AW; Kwok CY, 2008, 'Fabrication of monolthically integrated micromirror into a micro-bridge actuator using thin silicon substrate', in 4th Asia Pacific Conference on Transducers and Micro / Nano Technologies, 4th Asia Pacific Conference, Taiwan, presented at 4th Asia Pacific Conference, Taiwan, 22 June 2008 - 25 June 2008
    Conference Papers | 2008
    Xu Y; Michael AW; Kwok CY, 2008, 'Investigation of Low TMAH concentration solution with NCW-601 Triton X-100 Surfactant on silicon surface.', in EUROSENSORS XXII 2008, EUROSENSORS XXII 2008, Germany, presented at EUROSENSORS XXII 2008, Germany, 07 September 2008 - 10 September 2008
    Conference Papers | 2008
    Xu Y; Michael AW; Kwok CY, 2008, 'Wet anisotropic etching by TMAH with NCW-1002 surfactant on crystalline silicon surface', in SPIE Smart Materials Nano+Micro-Smart Systems, Melbourne, Victoria, Australia, presented at Micro- and Nanoengineering IV and Complex Systems, Melbourne, Victoria, Australia, 10 December 2008 - 12 December 2008
    Conference Papers | 2007
    Kwok CY; Michael AW; Kaalund CJ, 2007, 'Novel out-of-plane micro-mirror actuator', in SPIE 2007: Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV, Beijing, China, presented at International Conference on Legal, Security and Privacy Issues in IT Law, Beijing, China, 05 December 2007 - 07 December 2007
    Conference Papers | 2007
    Kwok CY; Michael AW; Xu Y, 2007, 'Fabrication of smooth 45 micromirror using TMAH low concentration solution with NCW-601A surfactant on silicon', in SPIE 2007: Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV, Beijing, China, presented at International Conference on Legal, Security and Privacy Issues in IT Law, Beijing, China, 05 December 2007 - 07 December 2007
    Conference Papers | 2007
    Xu Y; Michael AW; Kwok CY, 2007, 'Fabrication of smooth 45 degrees micromirror using TMAH low concentration solution with NCW-601A surfactant on silicon - art. no. 68001W', in Proceedings of SPIE Volume 7503, SPIE, Washington, USA, presented at International Conference on Legal, Security and Privacy Issues in IT Law, Beijing, China, 05 December 2007 - 07 December 2007
    Conference Papers | 2006
    Michael AW; Kwok CY, 2006, 'Thermo-elastic behaviour of buckled multi-layered MEMS bridge: model and experiment', in IEEE Sensors 2006, Daegu, Korea, presented at IEEE Sensors 2006, Daegu, Korea, 22 October 2006 - 23 October 2006
    Conference Papers | 2005
    Michael AW; Kwok CY, 2005, 'Design Method for Bi-Stable Multi-Layered MEMS Bridge', in Morante JR (ed.), EUROSENSORS XIX, EUROSENSORS XIX, Barcelona, Spain, presented at EUROSENSORS XIX, Barcelona, Spain, 11 September 2005 - 14 September 2005
    Conference Papers | 2005
    Michael AW; Mackenzie MR; Yu KS; Kwok CY, 2005, 'Out-Of-Plane Electrothermally Actuated Bistable Buckled Microbridge Actuator', in Tang WC (ed.), 4th IEEE Conference on Sensors Proceedings, Irvine, CA, pp. 596 - 599, presented at 4th IEEE Conference on Sensors Proceedings, Irvine, CA, 31 October 2005 - 03 November 2005
    Conference Papers | 2004
    Kwok CY; Michael AW; Yu KS, 2004, 'Bi-stability behavior of thermally actuated micro-bridge', in Proceedings of SPIE Volume 7503, SPIE, Washington, USA, presented at SPIE 2004: Smart Materials, Nano-and Micro-Smart Systems, Sydney, 13 December 2004 - 15 December 2004
    Conference Papers | 2004
    Kwok CY; Michael AW; Yu KS, 2004, 'Dynamic modeling of bi-stable tri-layer micro-bridge', in Eurosensor XVIII, Eurosensor XVIII, Rome, Italy, pp. 940 - 943, presented at Eurosensor XVIII, Rome, Italy, 12 September 2004 - 15 September 2004
    Conference Papers | 2004
    Kwok CY; Michael AW; Yu KS, 2004, 'Two-way bi-stable out-of-plane actuation using composite bimorph bridge', in Moriizumi T; Fujita H (ed.), Asia-Pacific Conference of Transducers and Nicro-Nano Technology 2004, Asia-Pacific Conference of Transducers and Nicro-Nano Technology 2004, Sapporo, Japan, pp. 889 - 892, presented at Asia-Pacific Conference of Transducers and Nicro-Nano Technology 2004, Sapporo, Japan, 04 July 2004 - 08 July 2004
    Conference Papers | 2004
    Kwok CY; Michael AW; Yu KS, 2004, 'Two-way bistable out-of-plane actuator using Ti/Sio2 bilayer', in Proceedings of SPIE Volume 7503, SPIE, Washington, USA, presented at SPIE 2004: Smart Materials, Nano-and Micro-Smart Systems, Sydney, 13 December 2004 - 15 December 2004
    Conference Papers | 2004
    Kwok CY; Yu KS; Michael AW, 2004, 'Finite difference based dynamic modeling of MEMS bridge', in Proceedings of SPIE Volume 7503, SPIE, Washington, USA, presented at SPIE 2004: Smart Materials, Nano-and Micro-Smart Systems, Sydney, 13 December 2004 - 15 December 2004
    Conference Papers | 2003
    Kwok CY; Michael AW; Yu KS, 2003, 'A Novel Bistable Themmally Actuated Snap-Through Acturator for Out of Plane Deflection', in Device and Process Technologies for MEMS, Microelectronics and Photonics III, Perth, WA, presented at Device and Process Technologies for MEMS, Microelectronics and Photonics III, Perth, WA, 10 December 2003 - 12 December 2003
    Conference Papers | 2003
    Kwok CY; Michael AW; Yu KS, 2003, 'Theoretical Analysis of Initially Buckled, Thermally Actuated, and Snapping Bimorph Micro Bridge', in Device and Process Technologies for MEMS, Microelectronics and Photonics III, Perth, WA, presented at Device and Process Technologies for MEMS, Microelectronics and Photonics III, Perth, WA, 10 December 2003 - 12 December 2003

  • 2021 ARC LIEF for "Advanced Maskless Lithography for Western Australia" LE210100126 $527K
  • 2018 Research Infrastructure Scheme
    • Maintenance and upgrades for Micro/Nano fabrication and measurement tools
    • $180000
    • Investigator: Dr. Aron Michael, Scientia Prof. Nigel Novell, Prof. Rodica Ramer, Prof. Chee Kwok, Prof Francois Ladouceur, Prof. Gang Ding Peng, A/Prof. Torsten Lehmann, and Dr. Victoria Timchenko.

  • 2018 Innovation Connect grant – Department of industry, innovation and science with Baraja Pty ltd
    • Feasibility study of MEMS based tunable diffraction grating for self-driving vehicles
    • $120000
    • Investigator: Dr. Aron Michael

  • 2017 Global Connections Fund – Bridging Grant from Australian Academy of Sciences and

Engineering (ATSE)

    • Development of Carbon nanofiber flow sensor prototype for biomedical application
    • $46500
    • Investigator: Dr. Aron Michael

  • 2016 Research Infrastructure Scheme
    • High Sensitivity Single Photon Spectroscopy System (SPSS)
    • $64,750
    • Investigators: Prof. Peng Gang-Ding, Prof. Kwok Chee Yee, Prof. Ladouceur Francois, Prof Barton Michael, A/Prof Li Yong, Prof. Bao Jie, Prof Wang Jun, Prof. Prusty Gangadhara, Dr. Michael Aron, Dr. Obbard Edward, Dr. Burr Patrick, Dr. Wang Danyang, Dr. Luo Yanhua

  • 2015 Major Research Equipment Grant
    • fs Broadband Tunable Laser System
    • $133,035
    • Investigators: Prof. Peng Gang-Ding, Prof. Kwok Chee Yee, Prof. Ladouceur Francois, Dr. Michael Aron, Prof. Amal Rose, Prof. Bao Jie, Prof. Lovell Nigel, Dr. Green Rylie, Prof. Wang Jun, Prof. Prusty Gangadhara, Dr. Taylor Robert, Prof. Li Sean

  • 2015 Major Research Equipment Grant
    • A high-resolution Raman microspectrometer for materials characterization and imaging
    • $175000
    • Investigators: Anne Rich, James Hook, Martin Van Kranendonk, Greg Leslie, Jun Wang, Gavin Conibeer, Chris Sorrell, Oleg Ostrovski, Richard Collins, Ziv Hameiri, Arnaud Castel, Megan Zhang, Francois Aguey-Zinsou, Anita Ho-Baillie, Pramod Koshy, Da-Wei Wang, Jason Scott, Yun Hau Ng, Michael Aron, Huang Shujuan, Hao Xiaojing, Green Martin, Gooding Justin.

  • 2014 Major Research Equipment Grant
    • Equipment to enhance MEMS/NEMS research
    • $58,000
    • Investigators: Prof. Chee Yee Kwok, Dr. Aron Michael, Dr. Robert Norden, A/Prof Francois Ladouceur, Dr. Victoria Timechenko

  • 2014 Faculty Research Grant/Early Researcher Grants Program
    • Ultra-sensitive in-plane displacement sensors with optical readout
    • $40,000
    • Investigator: Dr. Aron Michael

  • 2012 Faculty Research Grant program/Early Researcher Grants Program
    • Miniaturized and fast Atomic Force Microscopy
    • $20,000
    • Investigator: Dr. Aron Michael

  • 2011 Minor Research Equipment
    • Precision LC200V system
    • $10,975
    • Investigator: Dr. Aron Michael

  • 2011 Major Research Equipment Grant
    • Polytec Microsystem Analyzer
    • $150000
    • Investigators: Prof. Chee Kwok, A/Prof Francois Ladouceur, Prof. Nigel Novell, Prof. Gang Ding Peng, Dr. Aron Michael, Dr.Robert Norden, A/Prof Gary Rosengarten, Dr. Victoria Timchenko, Dr. Peng Zhongziao, and Prof. Rodica Ramer

2010 NSI UNSW, Inventor of the year award, staff category for “3D- OpticalԳٱDzԲԱ𳦳”

y research interest is in Micro-Electro-Mechanical Systems (MEMS) in general and Micro-Opto-Electro-Mechanical Systems (MOEMS) in particular. Specific research interests include

  • Novel Micro/Nano silicon based fabrication techniques
  • On-chip PZT based piezo-electric actuation mechanisms
  • CMOS-MEMS integration
  • Studying UHV e-beam evaporated silicon films for MEMS and integrated photonics
  • Development of on-chip high speed parallel Atomic Force Microscopy system
  • On-chip optical in-plane displacement sensors based on integrated silicon photonics
  • Design, modeling, and simulation of MEMS
  • Microelectronics for sensors and actuators
  • 3D optical interconnect for integrated circuit stacks
  • MEMS based cooling system for 3D integrated circuit stacks
  • Carbon nanofibers for flexible and wearable applications

Applications of research interests

  • Micro-optics and on-chip energy harvesting for implantable devices
  • System-on-Chip
  • Nanomachines and microactuators
  • Miniaturized and high performance optical devices with large optical zooming and fast auto focus capability for mobile handsets, security, medical, and automotive applications.
  • MicroLidar - MEMS based approaches
  • High performance on-chip Inertial Measurement Units (accelerometers and gyroscopes);
  • High resolution scanning probe lithography techniques for the next generation atomic scale fabrication, high density storage, nano-metrology, and visualization of nano scale bio-molecular and chemical dynamic processes in large scale.
  • MEMS based 3D integration of stacked chips - optical interconnect
  • MEMS cooling solution for Tera-bit computation

  • Actively engaged with academics and industries for collaborative research opportunities. Some notable examples innovation bridging grant in 2017 from ATSE with Sensornomics - start up company in Singapore, European camera phone developer companies, Polight and Miniswsys, andBaraja Pty Ltd, a start-up company which is developing a LiDAR technology for autonomous vehicles
  • Servingas technical and program committee for APCOT and Transducers major international conference in MEMS fields
  • Served as guest editor for special issue in Micromachine journal.
  • Regular reviewer in high tier journals in the field - Journal of MEMS, Sensors and actuators A: Physical, Micromachines, Journal of microengineering and micromechanics, Electron Device Letters...
  • Taste of Research coordinator in 2016.
  • Deputy director of academic study - Thesis coordinator since 2017
  • Casual academic coordinator in 2017 and 2018.
  • AEC (Academic Executive Committee) and assessment committee member at School.
  • Invited to “Digital uplift” panel – Engineering Course Design Institute.
  • Participated in Défense showcase.

My Research Supervision

Currently, I am supervising four PhD students

Yen Nee - 1st PhD student (Primary supervisor)

Fawwaz - 1st PhD student (Primary supervisor)

Mohammad Haq - 2nd year PhD student (Joint supervisor)

Syed Mamun - 2nd year PhD student (Joint supervisor)

My Teaching

My area of teaching expertise lies within the field of microsystems under electrical engineering. I have taught undergraduate and postgraduate courses.

  • Teaching undergraduate courses

ELEC2141: Digital Systems design

ELEC2142: Embedded Systems

ELEC2133: Analogue Electronics

  • Teaching postgraduate courses

ELEC9703: Integrated Circuit Technology (VLSI technology)

ELEC9704: Microsystems technology